Instruments Status


Instrument Comment Usage Status Booking ICS
FIB Description: FEI Helios NanoLab G3 UC FIB
Status: Normal Operation

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FEI Helios NanoLab DualBeam G3 UC - RBNIBook

Contact person: Dr. Larisa (Lora) Popilevsky

The dual-beam focused ion beam (FIB) at the Technion was purchased with the support of the Russell Berrie Nanotechnology Institute.

The Helios NanoLab G3 series DualBeam systems integrate ion and electron beams for FIB and SEM functionality in one machine. It enables switching between the two beams for quick and accurate navigation and milling. Convergence of the SEM and FIB at short working distance.

The FEI Helios NanoLab DualBeam allows fastest TEM sample preparation performance and allows highly flexible failure analysis capability and “slice-and-view” cross-sectioning at high resolution.

This SEM/FIB combines the most advanced scanning electron microscope (SEM) and focused ion beam (FIB) technologies with innovative gas chemistries, detectors, and manipulators. Featuring unsurpassed SEM resolution, image quality and Tomahawk™ FIB performance, imaging, milling, or preparing samples is fast and easy for semiconductor and data storage labs, research facilities and industrial applications.

The Helios NanoLab G3 is equipped with EDS and EBSD and enables 3D tomography.

This system enables Fib users to set and manage the schedule for the determination of the microwave - RBNIBook was programmed by Minici Catom Ltd

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